Darmasetiawan H, Irzaman I, Sukaryo SG, Hikam M, Bo NP. Effect of Annealed Duration and Temperature on Crystallinity of Ta2O5 Thin Films. ijp [Internet]. 31Oct.2016 [cited 24Nov.2024];13(1):23-6. Available from: https://ijphysics.fi.itb.ac.id/index.php/ijp/article/view/30