Mursal, Mursal, A. Supu, I. Usman, T. Winata, Sukirno Sukirno, and M. Barmawi. “Growth of Amorphous Silicon Germanium (a-SiGe:H) Alloys Thin Film by PECVD”. Indonesian Journal of Physics 15, no. 2 (November 3, 2016): 39-42. Accessed November 21, 2024. https://ijphysics.fi.itb.ac.id/index.php/ijp/article/view/106.