Mursal, Mursal, A. Supu, I. Usman, T. Winata, Sukirno Sukirno, and M. Barmawi. 2016. “Growth of Amorphous Silicon Germanium (a-SiGe:H) Alloys Thin Film by PECVD”. Indonesian Journal of Physics 15 (2), 39-42. https://ijphysics.fi.itb.ac.id/index.php/ijp/article/view/106.