Mursal, M., Supu, A., Usman, I., Winata, T., Sukirno, S., & Barmawi, M. (2016). Growth of Amorphous Silicon Germanium (a-SiGe:H) Alloys Thin Film by PECVD. Indonesian Journal of Physics, 15(2), 39-42. Retrieved from https://ijphysics.fi.itb.ac.id/index.php/ijp/article/view/106